منابع مشابه
Hydrogen Effects on Silicon Microsystems
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With the growing demand for mechanically flexible electrical systems and the increasing level of integration of electrical assemblies, hybrid build-ups combining polymer substrates and ultra-thin flexible silicon chips (system-in-foil) are getting more and more important. These systems need thin chips which maintain their functionality even in bent condition as well as reliable handling and ass...
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Integrated on-chip micro-instrumentation systems in silicon are complete data acquisition systems on a single chip. This concept has appeared to be the ultimate solution in many applications, as it enables in principle the metamorphosis of a basic sensing element, affected with many shortcomings, into an on-chip data acquisition unit that provides an output digital data stream in a standard for...
متن کاملA WSi-WSiN-Pt Metallization Scheme for Silicon Carbide-Based High Temperature Microsystems
In this paper, we present and discuss our new WSi–WSiN–Pt metallization scheme for SiC-based microsystems for applications in harsh environments. Stoichiometric material WSi was selected as contact material for SiC. The diffusion barrier material WSiN was deposited from the same target as the contact material in order to limit the number of different chemical elements in the scheme. Our scheme ...
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Design of a motion control system, convenient for a wide range of applications in industry, space, biology, medicine, particularly including more than one physics environment is very important. Well known control architectures like trajectory tracking, compliance control, interaction force control are scientific milestones which has common control task: to maintain desired system configuration....
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 1995
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.115.7